Ferroelectricity of hafnium oxide-based materials: Current status and future prospects from physical mechanisms to device applications
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Title
Ferroelectricity of hafnium oxide-based materials: Current status and future prospects from physical mechanisms to device applications
Authors
Keywords
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Journal
Journal of Semiconductors
Volume 44, Issue 5, Pages 053101
Publisher
IOP Publishing
Online
2023-05-18
DOI
10.1088/1674-4926/44/5/053101
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