TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films

Title
TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 117, Issue 13, Pages 134105
Publisher
AIP Publishing
Online
2015-04-07
DOI
10.1063/1.4916715

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