TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
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Title
TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 117, Issue 13, Pages 134105
Publisher
AIP Publishing
Online
2015-04-07
DOI
10.1063/1.4916715
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Related references
Note: Only part of the references are listed.- Electric Field Cycling Behavior of Ferroelectric Hafnium Oxide
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