Stabilization of ferroelectric HfxZr1−xO2 films using a millisecond flash lamp annealing technique
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Title
Stabilization of ferroelectric HfxZr1−xO2 films using a millisecond flash lamp annealing technique
Authors
Keywords
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Journal
APL Materials
Volume 6, Issue 12, Pages 121103
Publisher
AIP Publishing
Online
2018-12-11
DOI
10.1063/1.5060676
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