Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
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Title
Origin of Ferroelectric Phase in Undoped HfO
2
Films Deposited by Sputtering
Authors
Keywords
-
Journal
Advanced Materials Interfaces
Volume -, Issue -, Pages 1900042
Publisher
Wiley
Online
2019-04-30
DOI
10.1002/admi.201900042
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