A synergistic interplay between dopant ALD cycles and film thickness on the improvement of the ferroelectricity of uncapped Al:HfO2 nanofilms
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Title
A synergistic interplay between dopant ALD cycles and film thickness on the improvement of the ferroelectricity of uncapped Al:HfO2 nanofilms
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 32, Issue 21, Pages 215708
Publisher
IOP Publishing
Online
2021-02-19
DOI
10.1088/1361-6528/abe785
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