Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes

Title
Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 20, Pages 202903
Publisher
AIP Publishing
Online
2014-05-22
DOI
10.1063/1.4879283

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