Inductive crystallization effect of atomic-layer-deposited Hf0.5Zr0.5O2 films for ferroelectric application

Title
Inductive crystallization effect of atomic-layer-deposited Hf0.5Zr0.5O2 films for ferroelectric application
Authors
Keywords
Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>, Ru, Ferroelectricity, Phase transition
Journal
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
Publisher
Springer Nature
Online
2015-01-30
DOI
10.1186/s11671-014-0711-4

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