Highly enhanced ferroelectricity in HfO 2 -based ferroelectric thin film by light ion bombardment
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Title
Highly enhanced ferroelectricity in HfO
2
-based ferroelectric thin film by light ion bombardment
Authors
Keywords
-
Journal
SCIENCE
Volume 376, Issue 6594, Pages 731-738
Publisher
American Association for the Advancement of Science (AAAS)
Online
2022-05-13
DOI
10.1126/science.abk3195
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