Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
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Title
Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 7, Pages 072902
Publisher
AIP Publishing
Online
2014-08-19
DOI
10.1063/1.4893376
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