Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes

Title
Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 7, Pages 072902
Publisher
AIP Publishing
Online
2014-08-19
DOI
10.1063/1.4893376

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