Ferroelectricity of nondoped thin HfO2films in TiN/HfO2/TiN stacks

Title
Ferroelectricity of nondoped thin HfO2films in TiN/HfO2/TiN stacks
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 55, Issue 8S2, Pages 08PB01
Publisher
Japan Society of Applied Physics
Online
2016-06-06
DOI
10.7567/jjap.55.08pb01

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