Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes

Published 2013 View Full Article

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Title
Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 11, Pages 112914
Publisher
AIP Publishing
Online
2013-03-23
DOI
10.1063/1.4798265
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