Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics
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Title
Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET: A material relation to device physics
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 22, Pages 222903
Publisher
AIP Publishing
Online
2018-06-01
DOI
10.1063/1.5029324
References
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