Ferroelectricity in yttrium-doped hafnium oxide

Ferroelectricity in hafnium oxide thin films

(2011) T. S. Böscke et al.   APPLIED PHYSICS LETTERS

Ferroelectric Zr0.5Hf0.5O2thin films for nonvolatile memory applications

(2011) J. Müller et al.   APPLIED PHYSICS LETTERS

Study of a Negative Threshold Voltage Shift in Positive Bias Temperature Instability and a Positive Threshold Voltage Shift the Negative Bias Temperature Instability of Yttrium-Doped HfO2Gate Dielectrics

(2010) Motoyuki Sato et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Characterization upon potential properties of HfO2 stabilized by Y2O3 films as cubic phase

(2010) Lei Shi et al.   JOURNAL OF APPLIED PHYSICS

Composition–Structure–Dielectric Property of Yttrium-Doped Hafnium Oxide Films Deposited by Atomic Layer Deposition

(2009) Qian Tao et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Addition of yttrium into HfO2 films: Microstructure and electrical properties

(2009) C. Dubourdieu et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

(2009) J. Müller et al.   MICROELECTRONIC ENGINEERING

Electrical characterisation of HfYO MIM-structures deposited by ALD

(2009) T. Roessler et al.   THIN SOLID FILMS

Atomic Layer Deposition of High-Permittivity Yttrium-Doped HfO[sub 2] Films

(2008) Jaakko Niinistö et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Effects of Y doping on the structural stability and defect properties of cubic HfO[sub 2]

(2008) G. H. Chen et al.   JOURNAL OF APPLIED PHYSICS