High-Performance Operation and Solder Reflow Compatibility in BEOL-Integrated 16-Kb HfO₂: Si-Based 1T-1C FeRAM Arrays

Published 2022 View Full Article

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Title
High-Performance Operation and Solder Reflow Compatibility in BEOL-Integrated 16-Kb HfO₂: Si-Based 1T-1C FeRAM Arrays
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume -, Issue -, Pages 1-7
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2022-01-11
DOI
10.1109/ted.2021.3138360

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