Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer

Title
Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 19, Pages 192903
Publisher
AIP Publishing
Online
2014-11-15
DOI
10.1063/1.4902072

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