Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer
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Title
Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 105, Issue 19, Pages 192903
Publisher
AIP Publishing
Online
2014-11-15
DOI
10.1063/1.4902072
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Note: Only part of the references are listed.- Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
- (2014) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- The effects of crystallographic orientation and strain of thin Hf0.5Zr0.5O2 film on its ferroelectricity
- (2014) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes
- (2014) Min Hyuk Park et al. Physica Status Solidi-Rapid Research Letters
- Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Incipient Ferroelectricity in Al-Doped HfO2 Thin Films
- (2012) Stefan Mueller et al. ADVANCED FUNCTIONAL MATERIALS
- Ferroelectricity in Simple Binary ZrO2 and HfO2
- (2012) Johannes Müller et al. NANO LETTERS
- Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films
- (2012) Ekaterina Yurchuk et al. THIN SOLID FILMS
- Ferroelectricity in Gd-Doped HfO2Thin Films
- (2012) S. Mueller et al. ECS Journal of Solid State Science and Technology
- Ferroelectricity in hafnium oxide thin films
- (2011) T. S. Böscke et al. APPLIED PHYSICS LETTERS
- Ferroelectricity in yttrium-doped hafnium oxide
- (2011) J. Müller et al. JOURNAL OF APPLIED PHYSICS
- Grain boundary mediated leakage current in polycrystalline HfO2 films
- (2011) K. McKenna et al. MICROELECTRONIC ENGINEERING
- The Inlaid Al2O3Tunnel Switch for Ultrathin Ferroelectric Films
- (2009) An Quan Jiang et al. ADVANCED MATERIALS
- Size-dependent polymorphism in HfO2 nanotubes and nanoscale thin films
- (2009) Michael Shandalov et al. JOURNAL OF APPLIED PHYSICS
- Growth Behavior of Atomic-Layer-Deposited Pb(Zr,Ti)O[sub x] Thin Films on Planar Substrate and Three-Dimensional Hole Structures
- (2008) Takayuki Watanabe et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Band offsets of ultrathin high-κoxide films with Si
- (2008) Eric Bersch et al. PHYSICAL REVIEW B
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