Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films
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Title
Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 9, Pages 092906
Publisher
AIP Publishing
Online
2018-03-02
DOI
10.1063/1.5003369
References
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Related references
Note: Only part of the references are listed.- An extensive study of the influence of dopants on the ferroelectric properties of HfO2
- (2017) S. Starschich et al. Journal of Materials Chemistry C
- Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films
- (2016) Min Hyuk Park et al. ACS Applied Materials & Interfaces
- Ultrathin Hf0.5Zr0.5O2 Ferroelectric Films on Si
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- (2016) Han Joon Kim et al. Nanoscale
- Complex Internal Bias Fields in Ferroelectric Hafnium Oxide
- (2015) Tony Schenk et al. ACS Applied Materials & Interfaces
- Ferroelectricity and Antiferroelectricity of Doped Thin HfO2-Based Films
- (2015) Min Hyuk Park et al. ADVANCED MATERIALS
- Study on the size effect in Hf0.5Zr0.5O2 films thinner than 8 nm before and after wake-up field cycling
- (2015) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ferroelectricity in undoped hafnium oxide
- (2015) Patrick Polakowski et al. APPLIED PHYSICS LETTERS
- Steep Slope and Near Non-Hysteresis of FETs With Antiferroelectric-Like HfZrO for Low-Power Electronics
- (2015) M. H. Lee et al. IEEE ELECTRON DEVICE LETTERS
- TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
- (2015) Patrick D. Lomenzo et al. JOURNAL OF APPLIED PHYSICS
- Study on the internal field and conduction mechanism of atomic layer deposited ferroelectric Hf0.5Zr0.5O2 thin films
- (2015) M. H. Park et al. Journal of Materials Chemistry C
- Electric Field Cycling Behavior of Ferroelectric Hafnium Oxide
- (2014) Tony Schenk et al. ACS Applied Materials & Interfaces
- Ferroelectricity in Si-Doped HfO2Revealed: A Binary Lead-Free Ferroelectric
- (2014) Dominik Martin et al. ADVANCED MATERIALS
- Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
- (2014) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- The effects of crystallographic orientation and strain of thin Hf0.5Zr0.5O2 film on its ferroelectricity
- (2014) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer
- (2014) Han Joon Kim et al. APPLIED PHYSICS LETTERS
- Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes
- (2014) Min Hyuk Park et al. Physica Status Solidi-Rapid Research Letters
- Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
- (2013) Dayu Zhou et al. APPLIED PHYSICS LETTERS
- Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ferroelectric Zr0.5Hf0.5O2thin films for nonvolatile memory applications
- (2011) J. Müller et al. APPLIED PHYSICS LETTERS
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