Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films

Title
Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 9, Pages 092906
Publisher
AIP Publishing
Online
2018-03-02
DOI
10.1063/1.5003369

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