Effects of Capping Electrode on Ferroelectric Properties of Hf0.5Zr0.5O2 Thin Films

Title
Effects of Capping Electrode on Ferroelectric Properties of Hf0.5Zr0.5O2 Thin Films
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume -, Issue -, Pages 1-1
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-06-13
DOI
10.1109/led.2018.2846570

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