HfO2-ZrO2 Superlattice Ferroelectric Capacitor With Improved Endurance Performance and Higher Fatigue Recovery Capability

Published 2021 View Full Article

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Title
HfO2-ZrO2 Superlattice Ferroelectric Capacitor With Improved Endurance Performance and Higher Fatigue Recovery Capability
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 43, Issue 2, Pages 216-219
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-12-17
DOI
10.1109/led.2021.3135961

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