Electron transport across ultrathin ferroelectric Hf 0.5 Zr 0.5 O 2 films on Si

Published 2017 View Full Article

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Title
Electron transport across ultrathin ferroelectric Hf 0.5 Zr 0.5 O 2 films on Si
Authors
Keywords
Ferroelectric tunnel junction, Ultrathin ferroelectric films, HfO, 2, -based ferroelectrics, Electron transport
Journal
MICROELECTRONIC ENGINEERING
Volume 178, Issue -, Pages 250-253
Publisher
Elsevier BV
Online
2017-05-13
DOI
10.1016/j.mee.2017.05.028

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