Change of the trap energy levels of the atomic layer deposited HfLaOx films with different La concentration

Published 2009 View Full Article

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Title
Change of the trap energy levels of the atomic layer deposited HfLaOx films with different La concentration
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 26, Pages 262901
Publisher
AIP Publishing
Online
2009-07-01
DOI
10.1063/1.3159625
References
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