Critical Role of Interlayer in Hf0.5Zr0.5O2 Ferroelectric FET Nonvolatile Memory Performance

Authors

Keywords

Journal

Volume 65, Issue 6, Pages 2461-2469

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2018-04-28

DOI

10.1109/ted.2018.2829122

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