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Title
Atomic layer deposition of ZnO: a review
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 29, Issue 4, Pages 043001
Publisher
IOP Publishing
Online
2014-02-26
DOI
10.1088/0268-1242/29/4/043001
References
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- (2009) Y. T. Shih et al. APPLIED PHYSICS B-LASERS AND OPTICS
- Poly(3-hexylthiophene)/ZnO hybrid pn junctions for microelectronics applications
- (2009) E. Katsia et al. APPLIED PHYSICS LETTERS
- Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide
- (2009) Yen-Ting Lin et al. APPLIED SURFACE SCIENCE
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- (2009) Pavlo I. Stakhira et al. CENTRAL EUROPEAN JOURNAL OF PHYSICS
- Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
- (2009) Pieter C. Rowlette et al. CHEMICAL VAPOR DEPOSITION
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- (2009) Jeong-Seok Na et al. CHEMISTRY OF MATERIALS
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- (2009) I. Alessandri et al. CRYSTAL GROWTH & DESIGN
- Structural Characteristics and Annealing Effect of ZnO Epitaxial Films Grown by Atomic Layer Deposition
- (2009) S. Yang et al. CRYSTAL GROWTH & DESIGN
- Crystal Phase Evolution in Quantum Confined ZnO Domains on Particles via Atomic Layer Deposition
- (2009) David M. King et al. CRYSTAL GROWTH & DESIGN
- Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods
- (2009) Bo Hyun Kong et al. ELECTROCHEMICAL AND SOLID STATE LETTERS
- Fast PEALD ZnO Thin-Film Transistor Circuits
- (2009) Devin A. Mourey et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- ZnO grown by atomic layer deposition: A material for transparent electronics and organic heterojunctions
- (2009) E. Guziewicz et al. JOURNAL OF APPLIED PHYSICS
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- (2009) Jen-Chun Wang et al. JOURNAL OF MATERIALS CHEMISTRY
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- (2009) Seokhwan Bang et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
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- (2009) Jae Young Park et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
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- (2009) Sunghoon Park et al. JOURNAL OF THE KOREAN PHYSICAL SOCIETY
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- (2009) Sunyeol Jeon et al. JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Effect of Process Parameters on Remote PEALD for HighlyTransparent ZnO Film Growth
- (2009) Sung-Ku Kwon et al. JOURNAL OF THE KOREAN PHYSICAL SOCIETY
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- (2009) Woon-Seop Choi JOURNAL OF THE KOREAN PHYSICAL SOCIETY
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- (2009) Moon Deock Kim JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO films
- (2009) C. X. Shan et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- ZnTe–ZnO core–shell radial heterostructures grown by the combination of molecular beam epitaxy and atomic layer deposition
- (2009) E Janik et al. NANOTECHNOLOGY
- Zinc oxide nanorod based photonic devices: recent progress in growth, light emitting diodes and lasers
- (2009) M Willander et al. NANOTECHNOLOGY
- ZnO quantum dots embedded in a SiO2nanoparticle layer grown by atomic layer deposition
- (2009) M. K. Wu et al. Physica Status Solidi-Rapid Research Letters
- Low-temperature ZnO atomic layer deposition on biotemplates: flexible photocatalytic ZnO structures from eggshell membranes
- (2009) Seung-Mo Lee et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Fundamentals of zinc oxide as a semiconductor
- (2009) Anderson Janotti et al. REPORTS ON PROGRESS IN PHYSICS
- Characteristics of the ZnO thin film transistor by atomic layer deposition at various temperatures
- (2009) Semyung Kwon et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Fabrication of epitaxial ZnO films by atomic-layer deposition with interrupted flow
- (2009) Ching-Shun Ku et al. THIN SOLID FILMS
- Monocrystalline zinc oxide films grown by atomic layer deposition
- (2009) Ł. Wachnicki et al. THIN SOLID FILMS
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- (2008) David M. King et al. ADVANCED FUNCTIONAL MATERIALS
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- (2008) Alexandre Pourret et al. ADVANCED MATERIALS
- Reproducible growth of p-type ZnO:N using a modified atomic layer deposition process combined with dark annealing
- (2008) L. Dunlop et al. APPLIED PHYSICS LETTERS
- Ultraviolet Electroluminescence From n-ZnO–SiO$_{2}$–ZnO Nanocomposite/p-GaN Heterojunction Light-Emitting Diodes at Forward and Reverse Bias
- (2008) M.K. Wu et al. IEEE PHOTONICS TECHNOLOGY LETTERS
- Extremely low temperature growth of ZnO by atomic layer deposition
- (2008) E. Guziewicz et al. JOURNAL OF APPLIED PHYSICS
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- (2008) Ping-Yuan Lin et al. JOURNAL OF CRYSTAL GROWTH
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- (2008) Ki-Seok An et al. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
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- (2008) Robin H. A. Ras et al. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
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- (2008) Sunyeol Jeon et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- New selector based on zinc oxide grown by low temperature atomic layer deposition for vertically stacked non-volatile memory devices
- (2008) N. Huby et al. MICROELECTRONIC ENGINEERING
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- (2008) T. Krajewski et al. MICROELECTRONICS JOURNAL
- Effects of surface pretreatment on growth of ZnO on glass substrate
- (2008) Hisao Makino et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
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- (2008) Seokhwan Bang et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
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- (2008) Hyun-Wook Ra et al. Small
- Effects of annealing temperature of buffer layer on structural and optical properties of ZnO thin film grown by atomic layer deposition
- (2008) C.R. Kim et al. SOLID STATE COMMUNICATIONS
- Preparation of one dimensional Bi2O3-core/ZnO-shell structures by thermal evaporation and atomic layer deposition
- (2008) Sunghoon Park et al. SOLID STATE COMMUNICATIONS
- Low-temperature atomic layer deposition of ZnO films on particles in a fluidized bed reactor
- (2008) David M. King et al. THIN SOLID FILMS
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- (2008) Hisao Makino et al. THIN SOLID FILMS
- Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition
- (2007) A. Wójcik et al. JOURNAL OF CRYSTAL GROWTH
- Conformal ZnO coatings on high surface area silica gel using atomic layer deposition
- (2007) J.A. Libera et al. THIN SOLID FILMS
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