Comparison of dimethylzinc and diethylzinc as precursors for monocrystalline zinc oxide grown by atomic layer deposition method

Published 2010 View Full Article

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Title
Comparison of dimethylzinc and diethylzinc as precursors for monocrystalline zinc oxide grown by atomic layer deposition method
Authors
Keywords
-
Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 247, Issue 7, Pages 1699-1701
Publisher
Wiley
Online
2010-05-04
DOI
10.1002/pssb.200983687

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