Epitaxial growth of ZnO films at extremely low temperature by atomic layer deposition with interrupted flow

Published 2010 View Full Article

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Title
Epitaxial growth of ZnO films at extremely low temperature by atomic layer deposition with interrupted flow
Authors
Keywords
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Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 120, Issue 2-3, Pages 236-239
Publisher
Elsevier BV
Online
2010-01-13
DOI
10.1016/j.matchemphys.2009.12.028

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