The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method

Published 2012 View Full Article

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Title
The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 366, Issue -, Pages 43-46
Publisher
Elsevier BV
Online
2012-12-27
DOI
10.1016/j.jcrysgro.2012.12.024

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