Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition

Title
Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 2, Pages 021202
Publisher
American Vacuum Society
Online
2012-03-05
DOI
10.1116/1.3687939

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