Robust, High-Density Zinc Oxide Nanoarrays by Nanoimprint Lithography-Assisted Area-Selective Atomic Layer Deposition

Published 2012 View Full Article

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Title
Robust, High-Density Zinc Oxide Nanoarrays by Nanoimprint Lithography-Assisted Area-Selective Atomic Layer Deposition
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 116, Issue 44, Pages 23729-23734
Publisher
American Chemical Society (ACS)
Online
2012-10-02
DOI
10.1021/jp307152s

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