Study of the aluminum doping of zinc oxide films prepared by atomic layer deposition at low temperature

Published 2012 View Full Article

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Title
Study of the aluminum doping of zinc oxide films prepared by atomic layer deposition at low temperature
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 264, Issue -, Pages 464-469
Publisher
Elsevier BV
Online
2012-10-14
DOI
10.1016/j.apsusc.2012.10.045

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