Atomic layer deposition of Al-doped ZnO films using ozone as the oxygen source: A comparison of two methods to deliver aluminum

Preparation and character of textured ZnO:Al thin films deposited on flexible substrates by RF magnetron sputtering

(2011) Xiao-jing Wang et al.   MATERIALS LETTERS

Optical and electrical properties of ZnO:Al thin films synthesized by low-pressure pulsed laser deposition

(2011) X.Q. Gu et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

(2011) Jari Malm et al.   THIN SOLID FILMS

Suppression of substrate oxidation during ozone based atomic layer deposition of Al2O3: Effect of ozone flow rate

(2010) Jinhee Kwon et al.   APPLIED PHYSICS LETTERS

Characteristics of transparent conducting Al-doped ZnO films prepared by dc magnetron sputtering

(2010) Sung-Mok Jung et al.   CURRENT APPLIED PHYSICS

Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure

(2010) Deok Kyu Kim et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

(2010) Parag Banerjee et al.   JOURNAL OF APPLIED PHYSICS

The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

(2010) G. Luka et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Role of Gas Doping Sequence in Surface Reactions and Dopant Incorporation during Atomic Layer Deposition of Al-Doped ZnO

(2009) Jeong-Seok Na et al.   CHEMISTRY OF MATERIALS

Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods

(2009) Bo Hyun Kong et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

The effect of annealing processes on electronic properties of sol-gel derived Al-doped ZnO films

(2008) Jen-Po Lin et al.   APPLIED PHYSICS LETTERS

Extremely low temperature growth of ZnO by atomic layer deposition

(2008) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS

Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

(2008) David N. Goldstein et al.   Journal of Physical Chemistry C

Influence of oxygen argon ratio on the structural, electrical, optical and thermoelectrical properties of Al-doped ZnO thin films

(2008) L. Li et al.   PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES