Monocrystalline zinc oxide films grown by atomic layer deposition

Published 2009 View Full Article

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Title
Monocrystalline zinc oxide films grown by atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 16, Pages 4556-4559
Publisher
Elsevier BV
Online
2009-12-12
DOI
10.1016/j.tsf.2009.12.030

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