Characteristics of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition

Published 2011 View Full Article

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Title
Characteristics of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 6, Pages D395
Publisher
The Electrochemical Society
Online
2011-04-19
DOI
10.1149/1.3575161
References
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