Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc

(2009) Pieter C. Rowlette et al.   CHEMICAL VAPOR DEPOSITION

The Al-doping contents dependence of the crystal growth and energy band structure in Al:ZnO thin films

(2009) Jiaheng Wang et al.   JOURNAL OF CRYSTAL GROWTH

Atomic structures of supersaturated ZnO–Al2O3 solid solutions

(2008) Satoru Yoshioka et al.   JOURNAL OF APPLIED PHYSICS

Extremely low temperature growth of ZnO by atomic layer deposition

(2008) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS

Preferential growth of ZnO thin films by the atomic layer deposition technique

(2008) Swee-Yong Pung et al.   NANOTECHNOLOGY

Optical properties of Al-doped ZnO thin films by ellipsometry

(2007) Qing Hua Li et al.   APPLIED SURFACE SCIENCE