Atomic Layer Deposition of p-Type Phosphorus-Doped Zinc Oxide Films Using Diethylzinc, Ozone and Trimethylphosphite

Title
Atomic Layer Deposition of p-Type Phosphorus-Doped Zinc Oxide Films Using Diethylzinc, Ozone and Trimethylphosphite
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 14, Issue 5, Pages H181
Publisher
The Electrochemical Society
Online
2011-02-19
DOI
10.1149/1.3537326

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