ALD of ZnO using diethylzinc as metal-precursor and oxygen as oxidizing agent

Published 2011 View Full Article

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Title
ALD of ZnO using diethylzinc as metal-precursor and oxygen as oxidizing agent
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 23, Pages 10031-10035
Publisher
Elsevier BV
Online
2011-07-06
DOI
10.1016/j.apsusc.2011.06.133

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