Blocking the Lateral Film Growth at the Nanoscale in Area-Selective Atomic Layer Deposition

Published 2008 View Full Article

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Title
Blocking the Lateral Film Growth at the Nanoscale in Area-Selective Atomic Layer Deposition
Authors
Keywords
-
Journal
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume 130, Issue 34, Pages 11252-11253
Publisher
American Chemical Society (ACS)
Online
2008-07-31
DOI
10.1021/ja803471g

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