Atomic layer deposition of Al-doped ZnO thin films

Transparent conductive ZnO:Al films grown by atomic layer deposition for Si-wire-based solar cells

(2011) Byeong-Yun Oh et al.   CURRENT APPLIED PHYSICS

Atomic Layer Deposition of Al-doped ZnO Films: Effect of Grain Orientation on Conductivity

(2010) Neil P. Dasgupta et al.   CHEMISTRY OF MATERIALS

Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

(2010) Parag Banerjee et al.   JOURNAL OF APPLIED PHYSICS

Microstructure and thermoelectric properties of Zn1−xAlxO ceramics fabricated by spark plasma sintering

(2010) N. Ma et al.   JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS

The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

(2010) G. Luka et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Extremely low temperature growth of ZnO by atomic layer deposition

(2008) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS