Spectroscopic characterization of highly doped ZnO films grown by atomic-layer deposition for three-dimensional infrared metamaterials [Invited]
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Title
Spectroscopic characterization of highly doped ZnO films grown by atomic-layer deposition for three-dimensional infrared metamaterials [Invited]
Authors
Keywords
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Journal
Optical Materials Express
Volume 1, Issue 5, Pages 883
Publisher
The Optical Society
Online
2011-09-02
DOI
10.1364/ome.1.000883
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