Mechanical and structural characterization of atomic layer deposition-based ZnO films

Published 2011 View Full Article

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Title
Mechanical and structural characterization of atomic layer deposition-based ZnO films
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 26, Issue 11, Pages 115005
Publisher
IOP Publishing
Online
2011-10-12
DOI
10.1088/0268-1242/26/11/115005
References
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