Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors

Title
Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors
Authors
Keywords
-
Journal
METALS AND MATERIALS INTERNATIONAL
Volume 16, Issue 6, Pages 953-958
Publisher
Springer Nature
Online
2011-01-20
DOI
10.1007/s12540-010-1214-1

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