New selector based on zinc oxide grown by low temperature atomic layer deposition for vertically stacked non-volatile memory devices

Published 2008 View Full Article

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Title
New selector based on zinc oxide grown by low temperature atomic layer deposition for vertically stacked non-volatile memory devices
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 12, Pages 2442-2444
Publisher
Elsevier BV
Online
2008-09-19
DOI
10.1016/j.mee.2008.07.016

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