Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films

Title
Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 5, Pages D277
Publisher
The Electrochemical Society
Online
2011-03-23
DOI
10.1149/1.3568881

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