Microstructural characterization at the interface of Al2O3/ZnO/Al2O3 thin films grown by atomic layer deposition

Published 2011 View Full Article

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Title
Microstructural characterization at the interface of Al2O3/ZnO/Al2O3 thin films grown by atomic layer deposition
Authors
Keywords
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Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 248, Issue 7, Pages 1634-1638
Publisher
Wiley
Online
2011-06-27
DOI
10.1002/pssb.201046551
References
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