Extremely low temperature growth of ZnO by atomic layer deposition

Published 2008 View Full Article

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Title
Extremely low temperature growth of ZnO by atomic layer deposition
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 3, Pages 033515
Publisher
AIP Publishing
Online
2008-02-12
DOI
10.1063/1.2836819

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