Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films

Title
Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 21, Issue 3, Pages 448-455
Publisher
Wiley
Online
2010-11-10
DOI
10.1002/adfm.201001342

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