Deposition of Al doped ZnO layers with various electrical types by atomic layer deposition

Published 2010 View Full Article

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Title
Deposition of Al doped ZnO layers with various electrical types by atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 2, Pages 747-750
Publisher
Elsevier BV
Online
2010-09-07
DOI
10.1016/j.tsf.2010.08.151

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