Effects of Rapid Thermal Annealing on Structural, Luminescent, and Electrical Properties of Al-Doped ZnO Films Grown by Atomic Layer Deposition

Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition

(2011) Yang Geng et al.   Journal of Physical Chemistry C

Temperature dependent in situ doping of ALD ZnO

(2011) Zs. Baji et al.   JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY

Atomic layer deposition of Al-doped ZnO films using ozone as the oxygen source: A comparison of two methods to deliver aluminum

(2011) Hai Yuan et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films

(2010) Do-Joong Lee et al.   ADVANCED FUNCTIONAL MATERIALS

Atomic Layer Deposition of Al-doped ZnO Films: Effect of Grain Orientation on Conductivity

(2010) Neil P. Dasgupta et al.   CHEMISTRY OF MATERIALS

Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

(2010) Parag Banerjee et al.   JOURNAL OF APPLIED PHYSICS

Effective atomic layer deposition procedure for Al-dopant distribution in ZnO thin films

(2010) Jin Yong Kim et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Microstructural and surface property variations due to the amorphous region formed by thermal annealing in Al-doped ZnO thin films grown on n-Si (100) substrates

(2009) J.H. Han et al.   APPLIED SURFACE SCIENCE

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Long vertically aligned titania nanotubes on transparent conducting oxide for highly efficient solar cells

(2009) Oomman K. Varghese et al.   Nature Nanotechnology

Structural, electrical and optical properties of sol–gel AZO thin films

(2008) Ka Eun Lee et al.   CURRENT APPLIED PHYSICS

Comparison of electrodeposited and sputtered intrinsic and aluminium-doped zinc oxide thin films

(2008) J S Wellings et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Optical properties of Al-doped ZnO thin films by ellipsometry

(2007) Qing Hua Li et al.   APPLIED SURFACE SCIENCE