Structural and Photoluminescence Properties of ZnO Films Grown on 6H-SiC Substrates by Low-Temperature Atomic Layer Deposition

Title
Structural and Photoluminescence Properties of ZnO Films Grown on 6H-SiC Substrates by Low-Temperature Atomic Layer Deposition
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 12, Pages H1213
Publisher
The Electrochemical Society
Online
2011-11-17
DOI
10.1149/2.031112jes

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