Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition

Published 2007 View Full Article

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Title
Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 2, Pages 284-289
Publisher
Elsevier BV
Online
2007-10-12
DOI
10.1016/j.jcrysgro.2007.10.010

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