Structural, electrical, and optical properties of Ti-doped ZnO films fabricated by atomic layer deposition

Published 2013 View Full Article

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Title
Structural, electrical, and optical properties of Ti-doped ZnO films fabricated by atomic layer deposition
Authors
Keywords
TZO films, ALD growth rates, Structure characteristics, Optical properties, Electrical properties
Journal
Nanoscale Research Letters
Volume 8, Issue 1, Pages 108
Publisher
Springer Nature
Online
2013-02-27
DOI
10.1186/1556-276x-8-108
References
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