Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications

Title
Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 22, Issue 12, Pages 1810-1815
Publisher
Springer Nature
Online
2011-04-18
DOI
10.1007/s10854-011-0367-0

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